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World's First NEMS-Based Gyroscope Operates at 50 kHz, "Beyond Frequencies Of Vibrations Common" in Severe Environments
The breakthrough was reported in a paper titled "50kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability" at IEEE SENSORS 2020.
While various applications are requiring improved robustness to vibrations beyond 20 kHz, state-of-the art gyroscopes are still operating around this frequency value due to a performance worsening which arises with frequency increase, the paper reported. This work proves that NEMS-based gyroscopes can be designed at larger operating frequencies … holding outstanding performance in terms of noise, stability and spurious modes for the considered footprint and (power) consumption.
increase the gyroscope’s operating frequency without reducing sensor
performance, CEA-Leti and POLIMI researchers replaced the capacitive detection
of MEMS gyroscopes with ultra-sensitive piezoresistive nano-gauges, said Philippe Robert, MEMS business development manager and senior expert
at CEA-Leti. This new 1.5 mm² high-frequency
gyroscope, protected by numerous patents, has characteristics that exceed the
state of the art in terms of bias, noise, linearity and other conditions.
have been working on several MEMS technologies for the last 15 years, and for
sure the advantages of M&NEMS technology are outstanding for several future
applications, said Giacomo Langfelder, head of the MEMS and Microsensors
laboratory at the Department of Electronics, Information Technology and
Bioengineering of Politecnico di Milano.
Press contact - - Politecnico di Milano
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.