innovation for industry
Article | Articles ＆ files | Micro-nanoelectronics | Micro-nanotechnologies
More than 600 CEA-Leti experts in microelectronic processes (deposition, photolithography, etching, planarization, bonding, etc.), equipment, and materials are developing technologies and components for future products in collaboration with many industrial partners (lab-to-fab model).
The platform relies on a pool of nano-characterization equipment that is unique in Europe, including electron microscopy, X-ray diffraction, magnetic resonance, ion beam processes.
The platform works with more than fifty industrial partners:
• Microelectronics stakeholders: STMicroelectronics, Soitec, Infineon, Intel, etc.
• Fabless companies and equipment manufacturers: ASML, Applied Materials, Lam Research, Screen, KLA, EVG, ASM, etc.
• Industrial users: telecoms, photonics, automobile equipment manufacturers, etc.
OVERVIEW OF MAIN ACTIVITES
Substrates and substrate engineering, including SOI and FD-SOI
MEMS and NEMS
Imagers and displays
11,000 m2 space
600 research engineers
50 new patents a year
WITH SUPPORT FROM
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.