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Research Platform

Clean Rooms

Published on 28 November 2022


CLEAN ROOMS

Manufacturing innovative devices for the industry

With a world class microelectronic equipment pool, CEA-Leti’s clean rooms help develop procedures involved in manufacturing innovative components and electronic circuits compatible with the industry’s high-volume requirements. CEA-Leti's clean rooms are ISO 9001 certified and are in operation 24h/7.

More than 600 CEA-Leti experts in microelectronic processes (deposition, photolithography, etching, planarization, bonding, etc.), equipment, and materials are developing technologies and components for future products in collaboration with many industrial partners (lab-to-fab model).

  • resilient, competitive manufacturing processes with an optimized number of stages and environmental impact;
  • customized, ready-to-use multistage modules for smooth transfers to our industrial partners’ production machines;
  • state-of-the-art prototypes in terms of miniaturization, energy efficiency, speed, frequency, and performance.

The platform relies on a pool of nano-characterization equipment that is unique in Europe, including electron microscopy, X-ray diffraction, magnetic resonance, ion beam processes.




​What expertise is provided to industrial stakeholders?

• Design and simulation of innovative circuits and components
• Development and validation of processes and process engineering
• Early-stage lifecycle analyses in R&D cycles
• Prototyping, controls, tests, and advanced characterization of substrates, components, and circuits
• Assessments and improvements to microelectronics equipment in conjunction with their suppliers
• Continuous transfers with our partners via the lab-to-fab model



Cutting edge preindustrial equipment

• 200 mm and 300 mm CMOS lines
• 200 mm MEMS linesm
• 200 mm and 300 mm MEMS and CMOS co-integration lines
• 300 mm 3D integration line
• 300 mm photonics platform
• 193 nm ASML immersion scanner
• Nano-characterization platform with a state-of-the-art equipment pool.




How to work with the clean room platform

CEA-Leti’s teams support the needs of its industrial partners across all or some stages of development, using bilateral contracts. Each collaboration is subject to an intellectual property agreement establishing the confidentiality of all work.

The platform works with more than fifty industrial partners:

• Microelectronics stakeholders: STMicroelectronics, Soitec, Infineon, Intel, etc.

• Fabless companies and equipment manufacturers: ASML, Applied Materials, Lam Research, Screen, KLA, EVG, ASM, etc.

• Industrial users: telecoms, photonics, automobile equipment manufacturers, etc.

Discover the clean room in video

OVERVIEW OF MAIN ACTIVITES

  • More-than-Moore microelectronics, Beyond CMOS, and More-than-Moore
  • Substrates and substrate engineering, including SOI and FD-SOI

  • Power components

  • MEMS and NEMS

  • Non-volatile memory

  • Imagers and displays

  • Silicon photonics

  • 3D integration

KEY FIGURES

  • 11,000 m2 space

  • 600 research engineers

  • 50 new patents a year

IMPLANTATION : 

  • Grenoble, CEA-Leti

WITH SUPPORT FROM

  • The Auvergne-Rhône-Alpes Region
  • Institut Carnot
  • Investissement France Avenir