EVENT
Explore the first Symposium for Materials, Processing, Interfaces, and Devices with CEA-Leti.
AVS provides the ideal platform for discussing the latest advances in the processing, characterization, measurement, and simulation of materials, surfaces, interfaces, and devices at the atomic scale.
As a member of the organizing committee, CEA-Leti plays an active role in these discussions and helps strengthen collaborations across the semiconductor ecosystem. Jean-Paul Barnes (CEA-Leti) will serve as moderator of the
Applied Surface Science session.
with Jean-Paul Barnes (CEA-Leti) serving as moderator at Applied Surface Science, CEA-Leti plays an active role in these discussions and helps strengthen collaborations across the semiconductor ecosystem.
DISCOVER CEA-LETI’S MAJOR SCIENTIFIC RESULTS AT AVS72
This year, CEA-Leti will present its latest scientific results through 4 papers and 2 posters, covering topics including:
- Plasma Science and Technology
- Atomic Scale Processing
- Applied Surface Science
- Advanced Microelectronic Materials and Devices
CEA-Leti's scientific papers
Wednesday, November 11, 2026 8:00 a.m.
Room 316
François Boulard, Ramy Ayoub, Lebanon; Emmanuel Petitprez, Stéphane Pocas, Nicolas Gauthier, Benoit Martin, Pierre Brianceau, Antoine Ronco, Nicolas Posseme
Cyclic dielectric etching challenges for nextgeneration FDSOI logic and quantum devices, Advanced materials calibration for nanosecond laser annealing simulations
Friday, November 13, 2026
10:30 a.m.
Room 318
Elouan Le Cun, Julien Patouillard, Rémy Gassilloud, Mathieu Bernard, Zdenek Chalupa, Krunoslav Romanjek, Wissem Baik, William Vandendaele, Elhadji-Alhousseyni Diallo, Tadeu Mota Frutuoso, Pauline Hauchecorne, Virginie Loup, Théo Cabaret, Frédérique Glowacki, Mouaad Yassine Aliouat, Elise Arnoux, Gennie Garnier, Marie-Claire Cyrille, Olivier Renault, Claire Fenouillet Béranger
Development of Metallic Gate Stacks at Atomic Scale : Application to Advanced FD-SOI Transistors
Session Biomaterial Interfaces
Poster Session - CA ThP 6
Session Plasma Science and Technology
Poster Session - PS ThP 39
Thursday, November 12, 2026
4:30 – 7:00 p.m.
Ballroom A
Chêne Thibaut, Roselyne Segaud, Thierry Chevolleau, Stéphane Minoret, Patrice Gergaud, Michaël Bouvier, Julien Garrione, Fabrice Nemouchi
Superconducting BEOL for Quantum Devices routing,
ABOUT THE AVS72 INTERNATIONAL SYMPOSIUM AND EXHIBITION
The AVS International Symposium and Exhibition is one of the largest in the world and provides an excellent opportunity for AVS attendees and members to view the latest and greatest cutting-edge products and services offered by over 200 participating companies to the research and manufacturing communities associated with vacuum science and technology.
More information on AVS72's website