Generic technology for
accelerometers, pressure sensors and gyrometers
What is M&NEMS?
A MEMS uses electricity as its energy source to fulfill a sensor or actuator function. Multi-accelerometer, gyrometer and pressure sensor technology is implemented in CEA-Leti's case.
When used as a sensor, a MEMS features a moving part sensitive to a physical quantity (e.g. speed, pressure, direction). Variation of this physical quantity is then converted into an electrical quantity, which is then analyzed by the MEMS electrical part. Sometimes, it integrates a micro-actuator, which will act on the mechanical part on receiving an electrical signal.
Applications
- This technology finds applications in various markets including:
- The environment
- Medical devices
- Industry and robotics
- Automotive
- Defense
- Consumer market
Nouveautés :
- Linear response while capacitive detection is very non-linear
- Less sensitivity to parasitic capacitances, which greatly simplifies electronic interface circuitry and assembly
- Better performance due to stress concentration in a very small gauge cross section.